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DCE Module
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DCE Module
TELINDY PLUS™
#Thermal ALD #LPCVD #Oxidation #Anneal
TELFORMULA™
#Oxide #Anneal #Nitride #Poly #TEOS #High-k
ALPHA(α)-303i
#Oxide #Anneal #Nitride #Poly #TEOS #HTO #High-k
TELINDY™
#Oxide #Anneal #Nitride #Poly #TEOS #HTO #High-k
TEL ALPHA-8SE™
ALPHA-8S
#Oxide #Anneal #Nitride #Poly #TEOS #High-k
Dry Clean
#F2 #Cl2 #Dry Clean #Wet Cleaning #Modification
New Foreline Sysem
#TEL#Oxide #Anneal #Nitride #Poly #TEOS #High-K
Seal Cap
#Seal Cap Heater #Hastelloy
DCE Module
#DCE #POCl₃ # Chemical Supply System
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