Purpose of Product | |
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It is a system that can be used to maintain a constant pressure within a chamber by controlling the cylinders between the semiconductor vacuum chamber and vacuum pumps. | |
Product Characteristics | |
- Pressure Range (Used): 1.3 X 10^-6 ~ 1.0 X 10^-5 Pa - Pressure Range (Valve) : 1.3 X 10^-9 Pa. m2/s Less than - Valve Open & Close Frequency: Under 10 times/min - Insulation Resistance : Above 10M Ohm DC 500V - Withstand Voltage : Must withstand more than 1 minutes in AC 500V - Heater Insulation Resistance: Above 100M Ohm (External/Internal) DC 500V |
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