PRODUCTS
RE-CREATE, RE-CYCLE Old Equipment, Protecting Our Environment.
Component
APC
Pressure Controller
#Furnace #Automatic Pressure Controller
| Purpose of Product | |
|---|---|
| It is a product that is developed to maintain a stable vacuum environment within the chamber through the implementation of a self-developed program and circuit design to meet the requirements for semiconductor vacuum pressure control. | |
| Product Characteristics | |
| - Pressure Repetition Degree: ±1% F.S.(”FULL SCALE”) - Number of Pressure Sensor Input Ports : 2 * P1: 0~133.322Pa, 0~266.644Pa, 0~1.33322kPa, 0~13.3322kPa * P2: 0~133.322kPa - Valve Opening (Range) : 0 ~ 28mm - Control Value in Serial Communication : 0 ~ 100.0 F.S.% (F.S. = 28mm Criteria) - SLOW Exhaust Reaching Pressure (Range) : 0 ~ 700Torr 또는 0~93.32kPa |
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Details
