PRODUCTS
RE-CREATE, RE-CYCLE Old Equipment, Protecting Our Environment.
Equipment
DCE Module
DCE Module
#DCE #POCl₃ # Chemical Supply System
| Purpose of Product | |
|---|---|
| Devices and control systems for supplying chemicals required in diffusion processes and deposition processes such as semiconductors and various related industrial fields. | |
| Product Characteristics | |
| The DCE Module consists of a battlefield including PLC and Control Panel, a thermostat that holds chemical sources and maintains them at a constant temperature, and a gas line consisting of gas-flowing pipes and valves. | |
Details
