| Purpose of Product | |
|---|---|
| Localization of TEL Semiconductor Equipment and New Foreline System Remodeling | |
| Product Characteristics | |
| Semiconductor Diffusion process Poly (B, C, D) / HTO, LTO, MTO / Nitride / Anneal / Teos / Pyro (Oxide) Localization of equipment and New Foreline System Remodeling |
|
Poly (B, C, D) / HTO, LTO, MTO / Nitride / Anneal / Teos / Pyro (Oxide)

